high voltage

57 Commerce Drive, Brookfield CT 06804 | Tel: 203-740-8555 | Fax: 203-740-9555

ERX, ERC SERIES

3kW High Voltage Power Supply

 

Description

The ERX-10kV, 3.3-15 kW standard ebeam power supplies are switch-mode units incorporating the latest in high frequency, high power switching technology. Each power level of this 10 kV family of power supplies is neatly packaged in a single rack-mountable chassis with approximate dimensions of 10 1/2” H x 19” W (max) x 22” Deep. These robust power supplies were designed to use modularity for ease of field maintenance.

Features

Operation of the power supplies can be accomplished locally via the front panel controls or remotely via the rear panel control connector J4. Three additional jacks (J5A, J5B and J5c) are provided for interface to external source modules. J-4 is a 25 Pin D connector while each of the J-5 connectors is a 9Pin D type.

Certain commands or signal are operative in both modes. For example, the local HV OFF/RESET pushbutton switch is operative in both local and remote modes.

UVC’s are management options are designed with the challenges of Thin Film Deposition in minds. Our solid-state ebeam power supplies can be configured for rapid arc detection with typical shutdown in <25us. Arc quenching mode with recovery time as fast as 5ms, or arc counting where excessive arcing results in latched fault to allow the HVPS to ride through expected process arcs, but maintain the ability to react to unexpected transient conditions.
It should be noted any of the models in the standard 6-10-15kW series could be customized to suite an end-user’s unique specifications. Typical options are:


Please contact the UVC Sales Office for further information regarding our Ebeam family of power supplies.

 

Electrical Specifications

Input
Voltage 230VAC ± 10% Single Ø
Frequency 50/60Hz
Current 20Amps Max at 207V
Output - High Voltage
Voltage 0--5.5kV DC, negative polarity (positive ground)
Current 0-600 mA DC
Regulation ± 0.1% (± 10V)
Ripple 0.05% rms (50V rms) maximum
Power 3.3 kW max
Output - Filament
Voltage 0-7V RMS
Current 0-35 Amps RMS
Frequency 33KHZ +10%
Duty Continuous
Regulator ±3% (Filament Current)
  ±1% (Emission Current)
  Note: Automatic crossover from filament current to emission when HV turns on (customer supplied filament transformer to have isolation >6kV DC)

 

Mechanical Specifications

Chassis Dimensions
Panel 19" W x 10 1/2" H
Chassis 22" Deep
Weight 18.65kG, 50Lbs.
Input Connection Power Cable, Phase orientation not critical
Output Connection Coaxial cable with the shield grounded
Indoor Use
Altitude 7500 Ft. Max
Humidity Non-Condensing
Temperature 40° C Max Ambient
Transient Voltage Category II
Pollution Degree @ In accordance with IEC 664

6000 Watt – ERX

10kw – ERC

Pin Out

Control – “Local”
Main Circuit Breaker  
HV – ON Push Button – White
Voltage Set Potentiometer
HV – OFF Push Button – Green
Local Filament ON Push Button – White
Emission Current Set Potentiometer – 10 Turns
Indicators Power On
  Remote Mode
  Interlock Open
  Arc
  Over-current
  Fault
  Ready for High Voltage
  High Voltage On
Meters 3.5 Digit LCD Type
  Voltage “10.00” kV
  Current “600” mA
Control - "Remote"
“25 Pin D” Connector Power Supply to Remote
  24V DC Fused Output
  HV – On Response
  Fault Response
KV Monitor 0-10V = 1-5KV
MA Monitor 0-6V = 0-600mA
Filament Current Monitor 0-10V = 0-5kV
Remote to Power Supply 24V Remote Command
  24V on Command
  Filament ON/OFF Command (24V DC = ON)
Remote Emission Current Reference BNC jack: Rear Panel
  Interlock: Contact Closure Required
  HV “ON” Response

Printable Brochures and Other Downloads